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Guoxing Technology Box Vacuum Plasma Treatment System GX-V1503

Guoxing Technology Box Vacuum Plasma Treatment System GX-V1503

Sales Advisory Hotline:+86 181 3605 7999

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箱式真空等离子体处理系统GX-V1503

主机尺寸:2000W x 1700D x 2500H mm(可定制化)

真空腔体尺寸1140W x 1560D x 960H mm(可定制化)

电极板配置16 片垂直电极板,15 个处理位置

有效区域1115W x 630H mm(可定制化)

等离子体电源:定制化

工艺气体控制

标配:

O2、N2:0~5000sccm;

CF4:0~400sccm;

Ar:0~2000sccm;

可选: 额外一路工艺气体,流量范围可定制

Yangzhou Guoxing Technology Co., Ltd
Tel:+86 181 3605 7999
Add:No. 6 Factory Building, No. 63 Chenxiang Group, 309 County Road, Daqiao Town, Jiangdu District, Yangzhou City (Yangzhou Factory)
No. 8-4, Pingxiang Road, Kunshan City, Jiangsu Province (Kunshan Office)

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